JPH0457878B2 - - Google Patents
Info
- Publication number
- JPH0457878B2 JPH0457878B2 JP16459184A JP16459184A JPH0457878B2 JP H0457878 B2 JPH0457878 B2 JP H0457878B2 JP 16459184 A JP16459184 A JP 16459184A JP 16459184 A JP16459184 A JP 16459184A JP H0457878 B2 JPH0457878 B2 JP H0457878B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- housing
- intake passage
- rotor
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010926 purge Methods 0.000 claims description 15
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 41
- 239000011261 inert gas Substances 0.000 description 8
- 239000003921 oil Substances 0.000 description 8
- 239000010687 lubricating oil Substances 0.000 description 7
- 239000002341 toxic gas Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16459184A JPS6143297A (ja) | 1984-08-06 | 1984-08-06 | 分子ポンプのガスパ−ジ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16459184A JPS6143297A (ja) | 1984-08-06 | 1984-08-06 | 分子ポンプのガスパ−ジ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6143297A JPS6143297A (ja) | 1986-03-01 |
| JPH0457878B2 true JPH0457878B2 (en]) | 1992-09-14 |
Family
ID=15796088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16459184A Granted JPS6143297A (ja) | 1984-08-06 | 1984-08-06 | 分子ポンプのガスパ−ジ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6143297A (en]) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4022523A1 (de) * | 1990-07-16 | 1992-01-23 | Pfeiffer Vakuumtechnik | Einrichtung zum fluten von schnell rotierenden vakuumpumpen |
| DE4132652C2 (de) * | 1991-10-01 | 1995-04-27 | Flachglas Ag | Verfahren zur Herstellung einer einfachgekrümmten oder einer doppeltgekrümmten Verbundglasscheibe, insbesondere für Kraftfahrzeuge |
| JP3795979B2 (ja) * | 1996-03-21 | 2006-07-12 | 株式会社大阪真空機器製作所 | 分子ポンプ |
| JP4763936B2 (ja) * | 2001-09-07 | 2011-08-31 | アドバンス電気工業株式会社 | バルブにおけるガスパージ方法及び構造 |
| JP5190214B2 (ja) * | 2007-03-29 | 2013-04-24 | 東京エレクトロン株式会社 | ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法 |
| JP7481085B2 (ja) * | 2018-09-26 | 2024-05-10 | 株式会社荏原製作所 | 気体移送装置および気体移送装置の使用方法 |
| FR3093544B1 (fr) * | 2019-03-05 | 2021-03-12 | Pfeiffer Vacuum | Pompe à vide turbomoléculaire et procédé de purge |
-
1984
- 1984-08-06 JP JP16459184A patent/JPS6143297A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6143297A (ja) | 1986-03-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |